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Micromachines as tools for nanotechnology /

Micromachines as tools for nanotechnology / H. Fujita (ed.) - Berlin ; New York : Springer, 2003. - xii, 211 : ill. ; 24 cm. - Microtechnology and MEMS .

Includes bibliographical references.

ISBN: 354000856X

LCCN: 2003045497

Subjects--Topical Terms:
Nanotechnology.
Microelectromechanical systems.

LC Class. No.: T174.7 / .F85 2003

Dewey Class. No.: 620/.5

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Micromachines as tools for nanotechnology /