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Lecture notes on principles of plasma processing /

Chen, Francis F., 1929-

Lecture notes on principles of plasma processing / Principles of plasma processing Francis F. Chen and Jane P. Chang. - New York : Kluwer Academic/Plenum Publishers, 2003. - ix, 208 p. : ill. ; 28 cm. + 1 CD-ROM (4 3/4 in.)

ISBN: 9780306474972

LCCN: 2002040665

Subjects--Topical Terms:
Plasma engineering.
Plasma chemistry.
Plasma dynamics.

LC Class. No.: TA2020 / .C454 2003

Dewey Class. No.: 621.044

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Lecture notes on principles of plasma processing /