Raman Research Institute Library OPAC

Raman Research Institute Library OPAC

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Reliability, testing, and characterization of MEMS/MOEMS III : 26-28 January, 2004, San Jose, California, USA / Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

Contributor(s): Material type: TextTextSeries: Proceedings of SPIE--the International Society for Optical Engineering ; v. 5343.Publication details: Bellingham, Wash. : SPIE, c2004.Description: xxxi, 312 p. : ill. ; 28 cmISBN:
  • 0819452513
Subject(s): DDC classification:
  • 621.381 22
LOC classification:
  • TK7875 .R44 2004
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Includes bibliographical references and author index.

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