TY  - BOOK
AU  - Spiller,Eberhard
TI  - Soft X-ray optics
SN  - 081941655X
AV  - TA1775 .S65 1994
U1  - 539.7/222 20
PY  - 1994///
CY  - Bellingham, Wash., USA
PB  - SPIE Optical Engineering Press
KW  - X-ray optics
KW  - Resolution (Optics)
N1  - Errata slip inserted; Includes bibliographical references and index
ER  -