Micromachines as tools for nanotechnology / 
H. Fujita (ed.) 
 - Berlin ;  New York :  Springer,  2003. 
 - xii, 211 :  ill. ;  24 cm. 
 - Microtechnology and MEMS .
<br/><br/>Includes bibliographical references. 
<br/><br/><label>ISBN: </label>354000856X  
<br/><br/><label>LCCN: </label>2003045497 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanotechnology.<br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>T174.7  / .F85 2003 
<br/><br/><label>Dewey Class. No.: </label>620/.5