TY  - BOOK
AU  - Fujita,Hiroyuki
TI  - Micromachines as tools for nanotechnology
SN  - 354000856X 
AV  - T174.7 .F85 2003
U1  - 620/.5 21
PY  - 2003///
CY  - Berlin, New York
PB  - Springer
KW  - Nanotechnology
KW  - Microelectromechanical systems
N1  - Includes bibliographical references
UR  - http://www.loc.gov/catdir/enhancements/fy0813/2003045497-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy0813/2003045497-t.html
ER  -