TY  - BOOK
AU  - Urey,Hakan
AU  - Dickensheets,David L.
ED  - Society of Photo-optical Instrumentation Engineers.
TI  - MOEMS display and imaging systems II: 26-27 January 2004, San Jose, California, USA 
T2  - SPIE proceedings series,
SN  - 0819452564
AV  - TK7875 .M62 2004
U1  - 621.36/7 22
PY  - 2004///
CY  - Bellingham, Wash., USA
PB  - SPIE
KW  - Microelectromechanical systems
KW  - Congresses
KW  - Imaging systems
KW  - Design and construction
KW  - Scanning systems
KW  - Optics, Adaptive
N1  - Includes bibliographical references and author index
ER  -