Characterization and metrology for ULSI technology 2005/ 
editors, David G. Seiler ... [et al.] 
 - Melville, N.Y. :  American Institute of Physics,  2005. 
 - xx, 667 p. :  ill. ;  28 cm. +  1 CD-ROM (4 3/4 in.) 
 - AIP conference proceedings,  v. 788  0094-243X ; .
 - AIP conference proceedings ;  no.788. .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0735402779 
<br/><br/><label>LCCN: </label>2005931820 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits--Ultra large scale integration--Congresses.<br/>Integrated circuits--Ultra large scale integration--Congresses--Software.
<br/><br/><label>LC Class. No.: </label>TK7874.76  / .I56 2005 
<br/><br/><label>Dewey Class. No.: </label>621.39/5