TY  - BOOK
AU  - Seiler,David G.
ED  - International Conference on Characterization and Metrology for ULSI Technology
ED  - National Institute of Standards and Technology (U.S.)
TI  - Characterization and metrology for ULSI technology 2005
T2  - AIP conference proceedings,
SN  - 0735402779
AV  - TK7874.76 .I56 2005
U1  - 621.39/5 22
PY  - 2005///
CY  - Melville, N.Y.
PB  - American Institute of Physics
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Congresses
KW  - Software
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0663/2005931820-d.html
ER  -