Chen, Francis F., 1929- Lecture notes on principles of plasma processing / Principles of plasma processing Francis F. Chen and Jane P. Chang. - New York : Kluwer Academic/Plenum Publishers, 2003. - ix, 208 p. : ill. ; 28 cm. + 1 CD-ROM (4 3/4 in.) ISBN: 9780306474972 LCCN: 2002040665 Subjects--Topical Terms: Plasma engineering.Plasma chemistry.Plasma dynamics. LC Class. No.: TA2020 / .C454 2003 Dewey Class. No.: 621.044