Chen, Francis F., 1929-

Lecture notes on principles of plasma processing / Principles of plasma processing Francis F. Chen and Jane P. Chang. - New York : Kluwer Academic/Plenum Publishers, 2003. - ix, 208 p. : ill. ; 28 cm. + 1 CD-ROM (4 3/4 in.)

9780306474972

2002040665


Plasma engineering.
Plasma chemistry.
Plasma dynamics.

TA2020 / .C454 2003

621.044