Raman Research Institute Library OPAC

Raman Research Institute Library OPAC

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Introductory MEMS : fabrication and applications / Thomas M. Adams, Richard A. Layton.

By: Contributor(s): Material type: TextTextPublisher number: 12102532Publication details: New York : Springer, c2010.Description: xv, 444 p. : ill. (some col.) ; 25 cmISBN:
  • 9780387095103 (hbk.)
Subject(s): DDC classification:
  • 621.381 22
LOC classification:
  • TK7875 .A33 2010
Other classification:
  • ZN 3750
Contents:
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
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Item type Current library Call number Status Date due Barcode
Books Books Raman Research Institute Library 621 ADA (Browse shelf(Opens below)) Available 26002

Includes bibliographical references and index.

1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.

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