| 000 | 01126cam a22003014a 4500 | ||
|---|---|---|---|
| 001 | 13118990 | ||
| 005 | 20191016144547.0 | ||
| 008 | 030311s2003 gw a b 001 0 eng | ||
| 010 | _a 2003045497 | ||
| 020 | _a354000856X | ||
| 040 |
_aDLC _dDLC |
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| 042 | _apcc | ||
| 050 | 0 | 0 |
_aT174.7 _b.F85 2003 |
| 082 | 0 | 0 |
_a620/.5 _221 |
| 245 | 0 | 0 |
_aMicromachines as tools for nanotechnology / _cH. Fujita (ed.) |
| 260 |
_aBerlin ; _aNew York : _bSpringer, _c2003. |
||
| 300 |
_axii, 211 : _bill. ; _c24 cm. |
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| 440 | 0 | _aMicrotechnology and MEMS | |
| 504 | _aIncludes bibliographical references. | ||
| 650 | 0 | _aNanotechnology. | |
| 650 | 0 | _aMicroelectromechanical systems. | |
| 700 | 1 |
_aFujita, Hiroyuki, _d1952- |
|
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0813/2003045497-d.html |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0813/2003045497-t.html |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f20 _gy-gencatlg |
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| 942 |
_2udc _cBK |
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| 999 |
_c23012 _d23012 |
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