| 000 | 01505cam a22003497a 4500 | ||
|---|---|---|---|
| 001 | 13677213 | ||
| 005 | 20191023162208.0 | ||
| 008 | 040804s2004 waua b 101 0 eng d | ||
| 010 | _a 2004301332 | ||
| 020 | _a0819452564 | ||
| 035 | _a(OCoLC)ocm54674153 | ||
| 040 |
_aLHL _dCUS _dDLC |
||
| 042 | _alccopycat | ||
| 050 | 0 | 0 |
_aTK7875 _b.M62 2004 |
| 082 | 0 | 0 |
_a621.36/7 _222 |
| 245 | 0 | 0 |
_aMOEMS display and imaging systems II : _b26-27 January 2004, San Jose, California, USA / _cHakan Urey, David L. Dickensheets, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering. |
| 260 |
_aBellingham, Wash., USA : _bSPIE, _cc2004. |
||
| 300 |
_axxix, 222 p. : _bill. ; _c28 cm. |
||
| 490 | 1 |
_aSPIE proceedings series, _x0277-786X ; _vv. 5348 |
|
| 504 | _aIncludes bibliographical references and author index. | ||
| 650 | 0 |
_aMicroelectromechanical systems _vCongresses. |
|
| 650 | 0 |
_aImaging systems _xDesign and construction _vCongresses. |
|
| 650 | 0 |
_aScanning systems _xDesign and construction _vCongresses. |
|
| 650 | 0 |
_aOptics, Adaptive _vCongresses. |
|
| 700 | 1 |
_aUrey, Hakan, _d1970- |
|
| 700 | 1 | _aDickensheets, David L. | |
| 710 | 2 | _aSociety of Photo-optical Instrumentation Engineers. | |
| 830 | 0 |
_aProceedings of SPIE--the International Society for Optical Engineering ; _vv. 5348. |
|
| 906 |
_a7 _bcbc _ccopycat _d2 _encip _f20 _gy-gencatlg |
||
| 942 |
_2udc _cBK |
||
| 999 |
_c23548 _d23548 |
||