000			01543cam a22003497a 4500
001			14064244
005			20191014160934.0
008			050804s2005 nyua b 101 0 eng
010			_a 2005931820
020			_a0735402779
035			_a(CStRLIN)PASGA3124406-B
040			_aDLC _dDLC
042			_alccopycat
050	0	0	_aTK7874.76 _b.I56 2005
082	0	4	_a621.39/5 _222
111	2		_aInternational Conference on Characterization and Metrology for ULSI Technology _d(2005 : _cRichardson, Tex.)
245	1	0	_aCharacterization and metrology for ULSI technology 2005/ _ceditors, David G. Seiler ... [et al.]
260			_aMelville, N.Y. : _bAmerican Institute of Physics, _c2005.
300			_axx, 667 p. : _bill. ; _c28 cm. + _e1 CD-ROM (4 3/4 in.)
490	1		_aAIP conference proceedings, _x0094-243X ; _vv. 788
504			_aIncludes bibliographical references and index.
650		0	_aIntegrated circuits _xUltra large scale integration _vCongresses.
650		0	_aIntegrated circuits _xUltra large scale integration _vCongresses _vSoftware.
700	1		_aSeiler, David G.
710	2		_aNational Institute of Standards and Technology (U.S.)
830		0	_aAIP conference proceedings ; _vno.788.
856	4	2	_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0663/2005931820-d.html
906			_a7 _bcbc _ccopycat _d2 _encip _f20 _gy-gencatlg
942			_2udc _cBK
999			_c24325 _d24325