000 00508 a2200145 4500
005 20190513140143.0
008 190513b xxu||||| |||| 00| 0 eng d
020 _a9781498741330
100 _aZHOU(Guangya) & LEE(Chengkuo)
245 _aOptical MEMS, nanophotonics, and their applications
260 _bCRC Press
_c2018
_aBoca Raton
300 _axiv; 432 pages; illus;
_c27 cm.
942 _2udc
_cBK
999 _c87795
_d87795