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Characterization and metrology for ULSI technology 2005/

Characterization and metrology for ULSI technology 2005/ editors, David G. Seiler ... [et al.] - Melville, N.Y. : American Institute of Physics, 2005. - xx, 667 p. : ill. ; 28 cm. + 1 CD-ROM (4 3/4 in.) - AIP conference proceedings, v. 788 0094-243X ; . - AIP conference proceedings ; no.788. .

Includes bibliographical references and index.

ISBN: 0735402779

LCCN: 2005931820

Subjects--Topical Terms:
Integrated circuits--Ultra large scale integration--Congresses.
Integrated circuits--Ultra large scale integration--Congresses--Software.

LC Class. No.: TK7874.76 / .I56 2005

Dewey Class. No.: 621.39/5

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Characterization and metrology for ULSI technology 2005/