Lecture notes on principles of plasma processing / Francis F. Chen and Jane P. Chang.
Material type: TextPublication details: New York : Kluwer Academic/Plenum Publishers, 2003.Description: ix, 208 p. : ill. ; 28 cm. + 1 CD-ROM (4 3/4 in.)ISBN:- 9780306474972
- Principles of plasma processing
- 621.044 21
- TA2020 .C454 2003
Item type | Current library | Call number | Status | Date due | Barcode | |
---|---|---|---|---|---|---|
Books | Raman Research Institute Library | 533.9 CHE (Browse shelf(Opens below)) | Available | 26734 |
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