Raman Research Institute Library OPAC

Raman Research Institute Library OPAC

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Lecture notes on principles of plasma processing / Francis F. Chen and Jane P. Chang.

By: Contributor(s): Material type: TextTextPublication details: New York : Kluwer Academic/Plenum Publishers, 2003.Description: ix, 208 p. : ill. ; 28 cm. + 1 CD-ROM (4 3/4 in.)ISBN:
  • 9780306474972
Other title:
  • Principles of plasma processing
Subject(s): DDC classification:
  • 621.044 21
LOC classification:
  • TA2020 .C454 2003
Online resources:
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Item type Current library Call number Status Date due Barcode
Books Books Raman Research Institute Library 533.9 CHE (Browse shelf(Opens below)) Available 26734

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