Raman Research Institute Library OPAC

Raman Research Institute Library OPAC

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Characterization and metrology for ULSI technology 2005/ editors, David G. Seiler ... [et al.]

By: Contributor(s): Material type: TextTextSeries: AIP conference proceedings ; no.788.Publication details: Melville, N.Y. : American Institute of Physics, 2005.Description: xx, 667 p. : ill. ; 28 cm. + 1 CD-ROM (4 3/4 in.)ISBN:
  • 0735402779
Subject(s): DDC classification:
  • 621.39/5 22
LOC classification:
  • TK7874.76 .I56 2005
Online resources:
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Includes bibliographical references and index.

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